Micro Fluidic Mass Flow Controller for Gases

  • Small footprint ensures space efficiency
  • Very small internal volume
  • Economical solution, low cost of ownership
  • Analog or digital communication
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MEMS based Mass Flow Controller for Gases, for OEM Applications

Bronkhorst® IQ+FLOW® model IQF-200C Mass Flow Controllers (MFCs) are suited for precise control of dry, clean, non-corrosive, non-explosive gases. The ultra compact MFC has a chip-based (MEMS) thermal mass flow sensor and is suited for flow ranges between 0,2…10 mln/min and 0,1…5 ln/min N2-equivalent at operating pressures between vacuum and 10 bar(g). Communication with the devices can be either in analog mode or digital over RS232 or RS485.

The ultra compact IQ+FLOW instruments are typically recommended for integration in analytical and medical equipment.

Technical specifications

Measurement / Control system
Flow range, based on N2
(intermediate ranges available)
min. 0,2…10 mln/min
max. 0,1…5 ln/min

Accuracy (incl. linearity)

< ±1,5% RD + ±0,5% FS
(Based on calibration with actual gas, at ambient temperature and at customer specified inlet pressure. Horizontal mounting position.)
Turndown 1:50 (2...100%)
Multiple fluid capability storage of max. 8 calibration curves
Fluids Dry, clean, non-corrosive gases. Standard calibration gases Air, N2, Ar, He, CO2 and H2. Other dry, clean, non-corrosive gases on request (O2, CO, …)
Repeatability for flows < 20 mln/min: < ±0.5% FS;
for flows > 20 mln/min: < ±0,5% RD
Settling time (in control) t98% down to 300 msec, 700 msec typical
Max. Kv-value 2,37 x 10-3
Operating temperature 5…50°C
Temperature sensitivity span: 0,2% RD/°C; zero: 0,01 mln/min/°C
Leak integrity, outboard 1 x 10-8 mbar∙l/s He
Attitude sensitivity max. error at 90° off horizontal 0,5 mln/min at 1 bar, typical N2
Mechanical parts
Material (wetted parts) aluminium, Si, SiOx, epoxy;
option: stainless steel body
Operating pressure 0...10 bar g
Max. differential pressure across control valve 9 bar dif.
Process connections
10-32 UNF threaded internal nut with 1/16” ferrule (SS316 or Peek);
1/16” or 1/8” OD compression type
Seals standard: Viton®; other on request
Weight 0,2 kg
Ingress protection (housing) IP40
Electrical properties
Readout sample time 2 msec
Power supply +15…24 Vdc
Max. power consumption 100 mA
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication RS232, RS485 (Modbus-RTU/ASCII or FLOW-BUS)
Electrical connection
Power/Analog/RS232/RS485 RJ45 modular jack

Technical specifications and dimensions subject to change without notice.
For dimensional drawings and hook-up diagrams please visit the productpage on our website


IQ-FLOW Brochure

Manual IQ-FLOW
Quick installation guide

Hook-up diagrams
Analog I-O RS232
RS232-RS485 Analog I-O

Dimensional drawing
Dimensional drawing IQF-IQP 1-channel in-line

Solids 3D

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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