Bronkhorst

EL-FLOW Metal Sealed F-201CM

Metal Sealed Mass Flow Controller for Gases

  • Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
  • Electropolished wetted parts
  • Cleanroom asembled
  • High accuracy, excellent repeatability
  • Multi Gas / Multi Range functionality (option)
  • Fast settling time (down to 600 msec)
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EL-FLOW Metal SealedF-201CM

Metal Sealed Gas Mass Flow Controllers

Bronkhorst® model F-201CM Mass Flow Controllers (MFCs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-201CM is suited for precise measurement and control of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1000 psig (64 bar).

EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Accuracy (incl. linearity)
(based on actual calibration)
±0,5% Rd plus ±0,1%FS
Repeatability < 0,2% Rd
Turndown 1 : 50 (in digital mode up to 1 : 150)
Settling time 1 second typical above 5% FS;
option: down to 600 msec
Control stability ± 0.05% FS (typical for 1 slm N2)
Max. operating pressure 1000 psig (64 bar)
Temperature sensitivity zero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity < 0,1% Rd/bar typical N2;
< 0,01% Rd/bar H2
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
General performance
Operating temperature -10…+50°C;
up to +70°C on request
Leak integrity(outboard) < 2 x 10-11 Pa.m3/s He
Leak-by through closed valve < 10-5 Pa.m3/s He
Attitude sensitivity may be mounted in any position
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Process connections 1/4” face seal male
Outer seals metal-to-metal (no rings)
Valve seat (controllers) Kalrez® (FFKM); options: Viton®, EPDM
Weight 0,7 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption
(controllers based on normally closed valve, pin 5 not used)
Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack

Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
Metal Sealed Mass Flow and Pressure brochure

Manuals
General manual digital instruments
Operating instructions digital instruments

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
Optional Bus and IO Configurations
PROFIBUS DP
PROFINET

Dimensional drawing
Dimensional drawing F-201CM


Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
info@bronkhorst.com

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