Bronkhorst

EL-FLOW Prestige FG-211CVP (P-Insensitive)

High Performance Mass Flow Controller for Gases

  • Static and dynamic pressure correction
  • On-board gas conversion model (Multi-Fluid / Multi-Range)
  • User configurable I/O functions
  • Significantly reduced power consumption
  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design
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EL-FLOW PrestigeFG-211CVP (P-Insensitive)

Pressure Insensitive Gas Mass Flow Controllers for low flow rates

Bronkhorst® model FG-211CVP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures up to 100 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-211CVP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

thermal gas flow meter
More simple setup possible with EL-FLOW Prestige Pressure Insensitive (PI) model

Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,14…7 mln/min
max. 0,4…20 ln/min

Accuracy (incl. linearity)
(based on actual calibration)

±0,5% Rd plus ±0,1%FS
Repeatability < 0,2% Rd
Turndown 1 : 150; in analog mode 1 : 50
Multi Gas/Multi Range gases embedded gas data for Air, N2, Ar, H2, O2, CO, CO2, He, CH4, SiH4, NH3, C2H2, C2H4, C2H6, Kr, C3H6 #2 (propene), C2F6, C3H8, NF3, N2O, H2S, Cl2, SF6, NO, Xe, plus any mixture of maximum 5 of these gases.
Settling time
(in control, typical)
fast: < 500 msec
standard: < 1 sec
slow: < 2 sec
Control stability ≤ ± 0,1% FS (typical for 1 ln/min N2)
Max. Kv-value 6,6 x 10-2
Operating temperature -10…70°C
Temperature sensitivity zero: < 0,02% FS/°C; span: < 0,025% Rd/°C
Pressure sensitivity < 0,15% Rd/bar typical N2;
< 0,02% Rd/bar N2 (incl. pressure correction option)
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating 100 bar (g)
Process connections compression type or face seal couplings
Seals standard: Viton®
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compounds
Electrical properties
Power supply +15…24 Vdc
Max. power consumption
(based on normally closed valve, pin 5 not used)
Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 76 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/PROFINET 2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS RJ45 modular jack
CE EMC 2014/30/EU, RoHS 2011/65/EU,
IEC 61010-1 2010
Ingress protection (housing) IP40

Technical specifications and dimensions subject to change without notice.
For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
EL-FLOW Prestige brochure

Manuals
Quick installation guide
Manual EL-FLOW Prestige

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
PROFIBUS DP
PROFINET
Optional Bus and IO Configurations

Dimensional drawing
Dimensional Drawing FG-201CVP - FG-211CVP


Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
info@bronkhorst.com

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