Bronkhorst

IN-FLOW F-110CI

Industrial Style Thermal Mass Flow Meter for Gases

  • Lowest gas flow ranges
  • Compact design, small internal volume
  • High accuracy
  • Virtually pressure and temperature independent
  • Rugged, weatherproof housing (IP65, dust and waterproof)
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IN-FLOWF-110CI

Industrial Style Gas Mass Flow Meters for lowest flow rates

Bronkhorst® model F-110CI Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 100 bar. The MFM consists of a thermal mass flow sensor and a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for optional mass flow control by means of a separately mounted control valve. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 approval.

IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, PROFINET, Modbus, or FLOW-BUS protocols. The IN-FLOW model features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.


Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,014…0,7 mln/min
max. 0,6…9 mln/min

Accuracy (incl. linearity)
(based on actual calibration)

±0,8% Rd plus ±0,2% FS for F-110CI-005;
±2% FS for F-110CI-002
Turndown 1:50 (in digital mode up to 1:187,5)
Multi fluid capability

storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs

Repeatability < 0,2% Rd

Response time

FS < 3 mln/min: 2 sec;
FS > 3 mln/min: 1…2 sec
Operating temperature -10…+70°C;
for ATEX cat. 3 0…50°C
Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90° off horizontal 0,2% FS at 1 bar, typical N2
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable
Pressure rating 100 bar abs
Process connections compression type or face seal couplings
Seals standard: Viton®; options: EPDM, Kalrez® (FFKM)
Weight 0,8 kg
Ingress protection (housing) IP65
Electrical properties
Power supply +15…24 Vdc
Max. power consumption Meter Supply
15 V
24 V
at voltage I/O
95 mA
65 mA
at current I/O
125 mA
85 mA
Max. power consumption Controller Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, PROFINET, DeviceNet™, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 8 DIN (male);
PROFIBUS DP bus: 5-pin M12 (female);
power: 8 DIN (male);
PROFINET bus: 2 x 5-pin M12 (female) (in/out);
power: 8 DIN (male);
Devicenet™ 5-pin M12 (male);
FLOW-BUS/Modbus-RTU/ASCII 5-pin M12 (male)

Technical specifications and dimensions subject to change without notice.
For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
IN-FLOW brochure
MASS-FLOW Select brochure

Manuals
General manual digital instruments
Operating instructions digital instruments

Hook-up diagrams
Analog IO - RS232
DeviceNet
FLOW-BUS
Modbus-RTU
PROFIBUS DP
PROFINET

Dimensional drawing
Dimensional Drawing F-110CI - F-100DI