Bronkhorst

LOW-ΔP-FLOW F-101D

Mass Flow Meter for low pressure drop or corrosive gas service

  • Large bore capillary (thermal bypass sensor)
  • Very low pressure drop
  • Less sensitivity to humidity or dirt
  • Suitable of corrosive gases
  • Easy to purge
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LOW-ΔP-FLOWF-101D

Thermal Mass Flow Meters for low pressure drop or corrosive gas applications

Bronkhorst® model F-101D Mass Flow Meters (MFMs) are suited for precise measurement of flow ranges between 0,42…21 mln/min and 0,042…2,1 ln/min (N2-equivalent). The instruments are particularly suited for corrosive gases or applications with very low differential pressure (∆P). Compared to conventional instruments, LOW-∆P-FLOW meters have larger flow channels to minimize the risk of clogging, facilitate cleaning and purging, and cause lower pressure drop (the sensor only requires 0,5 to 5 mbar).

The integrated digital pc-board provides signal and fieldbus conversion as well as PID controller functionality for optional mass flow control by means of a (separately mounted) control valve. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols.


Technical specifications

Measurement / control system
Flow range, based on N2
(intermediate ranges available)
min. 0,42…21 mln/min
max. 0,042…2,1 ln/min
Accuracy (incl. linearity)
(based on actual calibration)
± 1% FS
Turndown 1:50 (2...100%)
Multiple fluid capability storage of max. 8 calibration curves
Repeatability < 0,2% Rd
Response time (t63%) 1..2 sec
Operating temperature -10…+70°C
Temperature sensitivity < 0,1% FS/°C
Pressure sensitivity 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Leak integrity, outboard tested < 2 x 10-9 mbar l/s He
Mounting position horizontal
Warm-up time 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Mechanical parts
Material (wetted parts) stainless steel 316L or comparable; other on request
Process connections compression type or face seal couplings
Seals standard: Viton®; options: EPDM, Kalrez® (FFKM)
Weight 0,5 kg
Ingress protection (housing) IP40
Electrical properties
Power supply +15…24 Vdc
Max. power consumption Meter Supply
15 V
24 V
at voltage I/O
95 mA
65 mA
at current I/O
125 mA
85 mA
Max. power consumption Controller Supply
15 V
24 V
at voltage I/O
290 mA
200 mA
at current I/O
320 mA
215 mA
PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™ add 48 mA (24 V supply)
Analog output/command 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication standard: RS232;
options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS
Electrical connection
Analog/RS232 9-pin D-connector (male);
PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
Devicenet™ 5-pin M12-connector (male);
EtherCAT®/ PROFINET 2 x RJ45 modular jack (in/out)
FLOW-BUS/Modbus-RTU/ASCII RJ45 modular jack

Technical specifications and dimensions subject to change without notice.

For dimensional drawings and hook-up diagrams please visit the productpage on our website

Downloads

Brochures
LOW-ΔP-FLOW Brochure

Manuals
General manual digital instruments
Operating instructions digital instruments

Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus
Optional Bus and IO Configurations
PROFIBUS DP
PROFINET

Dimensional drawing


Bronkhorst High-Tech B.V.

Nijverheidsstraat 1A
NL-7261 AK Ruurlo (NL)
Tel. +31 573 45 88 00
[email protected]

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