CEM evaporator

The CEM system (Controlled Evaporation and Mixing) is an advanced liquid delivery system (LDS) designed for use in both atmospheric and vacuum processes. It combines a thermal or Coriolis liquid flow controller, a carrier‑gas mass flow controller, and a temperature‑controlled mixing and evaporation device to ensure stable and accurate vapor generation.

Do you want to learn more about vapor flow control? Check our flow academy article: the theory behind vapor flow control.

For what flow ranges can I use a CEM vapor system?

The CEM vapor delivery system is designed for flexible, accurate, and reliable vapor generation across a wide range of process conditions and precursor types. With heater capacities from 10 to 1000W and liquid flow ranges from approximately 1 to 1200 g/h water and up to 6000 g/h TEOS, it supports everything from low-flow solvent evaporation to high-throughput precursor delivery.

How can I use a CEM vapor system?

Combined with compact Coriolis liquid flow controller, the system ensures precise handling of a broad range of fluids. This includes water, solvents, and low vapor pressure precursors. In addition, the online tool FLUIDAT® helps users determine optimal evaporation and temperature settings for specific fluids, mixtures, recipes, and operating conditions. With a pressure range from vacuum up to 100 bar, the CEM system delivers stable, reproducible vapor generation for virtually any application scenario.  

The CEM evaporator system is very flexible and can combined with multiple instruments from our portfolio. Some examples of possible configurations. For the right setup, please contact your local sales contact.